- Contact Person : Ms. Lin Cindy
- Company Name : Shanghai Vakia Coating Technology Co., Ltd.
- Tel : 0086-21-57728812
- Fax : 0086-21-57746698
- Address : Shanghai,Shanghai,Guangsu Industrial Park,No.888,Kungang Road,Songjiang District,Shanghai,China
- Country/Region : China
- Zip : 201614
VAKIA-SRC-1600 evaporation combination with magnetron sputtering vacuum coater
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Feature:
1.Double-doors structure,more efficient for the coating and substrates loading
2.Efficient and rapid,Multifunction coating,various applications
3.Plastic,ceramics material coated with metal films,semi-transparent,NCVM,EMI,
dielectric film
Application:
Plastic,ceramics coated with Metal coatings,Imitation of golden coatings,widely used in arts & crafts,architecture and toy making
Model Function | VAKIA -SRC -900 | VAKIA -SRC -1000 | VAKIA -SRC -1200 | VAKIA -SRC -1400 | VAKIA -SRC -1500 | VAKIA -SRC -1800 |
Vacuum Chamber Inner Size | φ900 *H1100 mm | φ1000 *H1200 mm | φ1200 *H1500 mm | φ1400 *H1800 mm | φ1500 *H1900 mm | φ1800 *H2000 mm |
Power Supply Type | Resistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supplyPulse Bias Power Supply,Direct Current magnetron power Supply,Medium Frequency Magnetron Power Supply | |||||
Structure of Vacuum Chamber | Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System | |||||
Material of Vacuum Chamber | Superior Stainless Steel Chamber | |||||
Ultimate Vacuum | 8.0×10-4Pa | |||||
Pump-out Time(no-load) | From air to 5.0×10-2Pa≤8min | |||||
Vacuum Acquisition System | Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand) | |||||
Coating Style | Evaporation coating+magnetron sputtering coating | |||||
Kinds of Film | metal film,semi-transparent film,Non conductive vacuum metallization film Electromagnetic Interference film,Dielectric film | |||||
The Style of Magnetron target | Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target | |||||
Power of Magnetron bias power supply and the number of magnetron target | The appropriate equipment is selected according to demanders’requirements and different techniques | |||||
Work Piece Rotation maximum valid diameter | 6 axis φ260mm | 6 axis φ280mm | 6 axis φ360mm 8 axis φ280mm | 6 axis φ420mm 8 axis φ350mm | 6 axis φ460mm 8 axis φ380mm | 6 axis φ560mm 8 axis φ460mm |
Evaporation electrode | Standard configure 2 pair | |||||
Evaporation Power | 15KW | 15KW | 20KW | 25 KW | 30KW | 35KW |
Total Power | 50KW | 50KW | 65KW | 85 KW | 100KW | 135KW |
Process Gas | Two or three process gas flow control and display system,select automatic filling system | |||||
Cooling System | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander) | |||||
Work Piece Rotating Stand and Rotating Style | Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable) | |||||
Control Mode | Automatic and Manual operation modes integrated,touch screen,PLC or computer control | |||||
Alarm and Protection | It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock. | |||||
Cover Area | W3m×L3m | W3m×L3m | W3.5m×L4m | W5m×L5m | W6m×L6m | W6m×L8m |
Other Technical parameters | Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa | |||||
Remark | Designed flexible and select the appropriate equipment according to demanders’requirements | |||||
VAKIA-SRC-1600 evaporation combination with magnetron sputtering vacuum coater