Shanghai Vakia Coating Technology Co., Ltd.
Main products:vacuum coating machine
Products
Contact Us
  • Contact Person : Ms. Lin Cindy
  • Company Name : Shanghai Vakia Coating Technology Co., Ltd.
  • Tel : 0086-21-57728812
  • Fax : 0086-21-57746698
  • Address : Shanghai,Shanghai,Guangsu Industrial Park,No.888,Kungang Road,Songjiang District,Shanghai,China
  • Country/Region : China
  • Zip : 201614

VAKIA-SRC-1600 evaporation combination with magnetron sputtering vacuum coater

VAKIA-SRC-1600 evaporation combination with magnetron sputtering vacuum coater
Product Detailed
1.Size:1600 times H1900mm 2.Independent R &D team 3.Occupy space:W5m times L5m 4.Type:Magnetron Sputtering

Feature:

1.Double-doors structure,more efficient for the coating and substrates loading

2.Efficient and rapid,Multifunction coating,various applications

3.Plastic,ceramics material coated with metal films,semi-transparent,NCVM,EMI,

dielectric film

Application:

Plastic,ceramics coated with Metal coatings,Imitation of golden coatings,widely used in arts & crafts,architecture and toy making

             Model

Function      

VAKIA

-SRC

-900

VAKIA

-SRC

-1000

VAKIA

-SRC -1200

VAKIA

-SRC

-1400

VAKIA

-SRC

-1500

VAKIA

-SRC

-1800

Vacuum Chamber

Inner Size

φ900

*H1100

mm

φ1000

*H1200

mm

φ1200

*H1500

mm

φ1400

*H1800

mm

φ1500

*H1900

mm

φ1800

*H2000

mm

Power Supply Type

Resistance Evaporation Power Supply,Ion bombardment Power

Supply,Filament power supplyPulse Bias Power Supply,Direct Current magnetron power

Supply,Medium Frequency Magnetron Power Supply

Structure of Vacuum Chamber

Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System

Material of Vacuum Chamber

Superior Stainless Steel Chamber

Ultimate Vacuum

8.0×10-4Pa

Pump-out Time(no-load)

From air to 5.0×10-2Pa≤8min

Vacuum Acquisition

System

Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand)

Coating Style

Evaporation coating+magnetron sputtering coating

Kinds of Film

metal film,semi-transparent film,Non conductive vacuum metallization film

Electromagnetic Interference film,Dielectric film

The Style of Magnetron target

Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target

Power of

Magnetron bias power

supply

and the

number of

magnetron target

The appropriate equipment is selected according to demanders’requirements and different techniques

Work Piece

Rotation maximum

valid diameter

6 axis

φ260mm

6 axis

φ280mm

6 axis

φ360mm

8 axis

φ280mm

6 axis

φ420mm

8 axis

φ350mm

6 axis

φ460mm

8 axis

φ380mm

6 axis

φ560mm

8 axis

φ460mm

Evaporation electrode

Standard configure 2 pair

Evaporation Power

15KW

15KW

20KW

25 KW

30KW

35KW

Total Power

50KW

50KW

65KW

85 KW

100KW

135KW

Process Gas

Two or three process gas flow control and display system,select automatic filling system

Cooling System

Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander)

Work Piece

Rotating Stand and Rotating

Style

Planetary revolution-autorotation and frequency conversion speed regulation

(controlled and adjustable)

Control Mode

Automatic and Manual operation modes integrated,touch screen,PLC or computer control

Alarm and

Protection

It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.

Cover Area

W3m×L3m

W3m×L3m

W3.5m×L4m

W5m×L5m

W6m×L6m

W6m×L8m

Other Technical

parameters

Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa

Remark

Designed flexible and select the appropriate equipment according to

demanders’requirements

VAKIA-SRC-1600 evaporation combination with magnetron sputtering vacuum coater



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